GAAS/ALGAAS SINGLE-MODE OPTICAL WAVE-GUIDES WITH LOW PROPAGATION LOSS AND STRONG OPTICAL CONFINEMENT

被引：14

作者：

SETO, M

SHAHAR, A

DERI, RJ

TOMLINSON, WJ

YIYAN, A

机构：

来源：

APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 11期

关键词：

D O I：

10.1063/1.102572

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Singe-mode optical waveguides have been fabricated with a saturated bromine water etchant using single-heterostructure GaAs/AlGaAs epitaxial material, with propagation losses as low as 0.6 dB/cm for 1.66 μm deeply etched ribs (Δneff≅2.4) and losses below 0.2 dB/cm for 0.23 μm shallowly etched ribs (Δneff =0.0067), measured at λ=1.5 μm.

引用

页码：990 / 992

页数：3

共 5 条

[1] THEORETICAL AND EXPERIMENTAL INVESTIGATION OF GAAS/GAALAS AND N/N+ GAAS RIB WAVE-GUIDES
AUSTIN, MW
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1984, 2 (05) : 688 - 694
[2] RIB PROFILE EFFECTS ON SCATTERING IN SEMICONDUCTOR OPTICAL WAVE-GUIDES
DERI, RJ
HAWKINS, RJ
KAPON, E
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (16) : 1483 - 1485
[3] LOW-LOSS SINGLE-MODE GAAS/ALGAAS OPTICAL WAVE-GUIDES GROWN BY ORGANOMETALLIC VAPOR-PHASE EPITAXY
KAPON, E
BHAT, R
[J]. APPLIED PHYSICS LETTERS, 1987, 50 (23) : 1628 - 1630
[4] FABRICATION OF SUBMILLIMETER-RADIUS OPTICAL WAVE-GUIDE BENDS WITH ANISOTROPIC AND ISOTROPIC WET CHEMICAL ETCHANTS
SETO, M
DERI, RJ
YIYAN, A
COLAS, E
TOMLINSON, WJ
BHAT, R
SHAHAR, A
[J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1990, 8 (02) : 264 - 270
[5] SIMPLE AND ACCURATE LOSS MEASUREMENT TECHNIQUE FOR SEMICONDUCTOR OPTICAL WAVE-GUIDES
WALKER, RG
[J]. ELECTRONICS LETTERS, 1985, 21 (13) : 581 - 583

← 1 →