MICROMACHINED ARRAY OF ELECTROSTATIC ENERGY ANALYZERS FOR CHARGED-PARTICLES

The design, fabrication techniques, and first test results of a new type of micromachined energy analyzer for charged particles are presented. The novel design is based on a Bessel Box straight-line geometry with focusing in one dimension. The problem of small acceptance area due to the drastically reduced overall dimensions is accounted for by the use of a parallel array of small analyzers simultaneously. We describe the fabrication of a proof-of-concept micromachined Bessel Box array by means of anisotropic wet etching of [110] silicon, and we present ray-tracing simulations for a simple geometry. Finally, we show some test results of Auger electrons and discuss possible applications of generic small charged particle analyzers.