EPITAXIAL YBA2CU3O7-DELTA AIR-BRIDGE MICROBOLOMETERS ON SILICON SUBSTRATES

被引：22

作者：

BARTH, R

SIEWERT, J

JAEKEL, C

SPANGENBERG, B

KURZ, H

PRUSSEIT, W

UTZ, B

WOLF, H

机构：

[1] TECH UNIV MUNICH,DEPT PHYS E10,D-85747 GARCHING,GERMANY

[2] PHYS TECH BUNDESANSTALT,D-38116 BRAUNSCHWEIG,GERMANY

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 78卷 / 06期

关键词：

D O I：

10.1063/1.360745

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Silicon micromachining technology is applied to fabricate free-standing YBCO structures for low-thermal-mass bolometer devices. The bolometric response of the devices is studied with chopped IR illumination at a wavelength of 1.3 mu m. The micromachining process leads to an enhancement of sensitivity by more than one order of magnitude. The optical responsivity of the air-bridge bolometers measured at the midpoint of the resistive transition is 1.29 kV/W and the time constant is 81 mu s. The optical noise equivalent power is 1.1X10(-11) W/Hz(1/2). (C) 1995 American Institute of Physics.

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页码：4218 / 4221

页数：4

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