2-STAGE ARSENIC CRACKING SOURCE WITH INTEGRAL GETTER PUMP FOR MBE GROWTH

被引：12

作者：

KRUSOR, BS

BACHRACH, RZ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.582516

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：138 / 141

页数：4

共 14 条

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[3]

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[6]

DUGGAN G, UNPUB J PHYS

[7]

FARROW RFC, 1982, 2ND INT S MOL BEAM E

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[9] IDENTIFICATION OF SPECIES EVOLVED IN EVAPORATION OF III-V COMPOUNDS [J].

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[10] INTERACTION KINETICS OF AS4 AND GA ON [100] GAAS SURFACES USING A MODULATED MOLECULAR-BEAM TECHNIQUE [J].

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