ELLIPSOMETRIC AND X-RAY SPECULAR REFLECTION STUDIES ON NATURALLY GROWN OVERLAYERS ON ALUMINUM THIN-FILMS

被引：19

作者：

BARNA, PB

BODO, Z

GERGELY, G

CROCE, P

ADAM, J

JAKAB, P

机构：

[1] TUNGSRAM RES CTR,H-1340 BUDAPEST,HUNGARY

[2] CTR UNIV ORSAY,INST OPT,F-91406 ORSAY,FRANCE

来源：

THIN SOLID FILMS | 1984年 / 120卷 / 04期

关键词：

D O I：

10.1016/0040-6090(84)90239-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：249 / 256

页数：8

共 15 条

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