CHARACTERIZATION OF A 3-CM KAUFMAN ION-SOURCE WITH NITROGEN FEED GAS

被引：48

作者：

VANVECHTEN, D

HUBLER, GK

DONOVAN, EP

机构：

来源：

VACUUM | 1986年 / 36卷 / 11-12期

关键词：

D O I：

10.1016/0042-207X(86)90123-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：841 / 845

页数：5

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