EPITAXIAL THIN-FILMS OF YBA2CU3O7-X ON LAAIO3 SUBSTRATES DEPOSITED BY PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：34

作者：

CHERN, CS ^{[1
]}

ZHAO, J ^{[1
]}

LI, YQ ^{[1
]}

NORRIS, P ^{[1
]}

KEAR, B ^{[1
]}

GALLOIS, B ^{[1
]}

KALMAN, Z ^{[1
]}

机构：

[1] EMCORE CORP,SOMERSET,NJ 08873

来源：

APPLIED PHYSICS LETTERS | 1991年 / 58卷 / 02期

关键词：

D O I：

10.1063/1.104973

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

High quality epitaxial YBa2Cu3O7-x (YBCO) superconducting thin films (0.3-mu-m thick) were grown on the closely lattice and thermal expansion matched substrate, LaAlO3, which has low dielectric loss. The YBCO layers were prepared, in situ, by a microwave plasma-enhanced metalorganic chemical vapor deposition process. The films, which had mirror-like smooth surfaces, were deposited at a substrate temperature of 730-degrees-C with a partial pressure of 2 Torr of N2O. The electrical resistance and magnetic susceptibility versus temperature of the as-deposited films show metallic behavior in the normal state and sharp superconducting transitions with T(c) (R = O) of 88 K. Critical current densities measured on patterned bridges were 5 X 10(5) A/cm2 at 78 K for the films deposited on LaAlO3. X-ray diffraction measurements indicate that films grow epitaxially in the plane of the substrate with axis perpendicular to the substrate surface.

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页码：185 / 187

页数：3

相关论文

共 17 条

[1] THE MICROSTRUCTURE OF HIGH - CRITICAL CURRENT SUPERCONDUCTING FILMS [J].

CHAUDHARI, P ;

LEGOUES, FK ;

SEGMULLER, A .

SCIENCE, 1987, 238 (4825) :342-344

[2] INSITU GROWTH OF YBA2CU3O7-X HIGH-TC SUPERCONDUCTING THIN-FILMS DIRECTLY ON SAPPHIRE BY PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].

CHERN, CS ;

ZHAO, J ;

LI, YQ ;

NORRIS, P ;

KEAR, B ;

GALLOIS, B .

APPLIED PHYSICS LETTERS, 1990, 57 (07) :721-723

[3]

GEERK J, 1989, MATER SCI REP, V4, P195

[4]

Huang W.-M., UNPUB

[5] MICROWAVE PROPERTIES OF HIGHLY ORIENTED YBA2CU3O7-X THIN-FILMS [J].

INAM, A ;

WU, XD ;

NAZAR, L ;

HEGDE, MS ;

ROGERS, CT ;

VENKATESAN, T ;

SIMON, RW ;

DALY, K ;

PADAMSEE, H ;

KIRCHGESSNER, J ;

MOFFAT, D ;

RUBIN, D ;

SHU, QS ;

KALOKITIS, D ;

FATHY, A ;

PENDRICK, V ;

BROWN, R ;

BRYCKI, B ;

BELOHOUBEK, E ;

DRABECK, L ;

GRUNER, G ;

HAMMOND, R ;

GAMBLE, F ;

LAIRSON, BM ;

BRAVMAN, JC .

APPLIED PHYSICS LETTERS, 1990, 56 (12) :1178-1180

[6] LOW-TEMPERATURE FORMATION OF MULTILAYERED BI(PB)-SR-CA-CU-O THIN-FILMS BY SUCCESSIVE DEPOSITION USING LASER ABLATION [J].

KANAI, M ;

KAWAI, T ;

KAWAI, S ;

TABATA, H .

APPLIED PHYSICS LETTERS, 1989, 54 (18) :1802-1804

[7] ROLE OF ATOMIC OXYGEN IN THE LOW-TEMPERATURE GROWTH OF YBA2CU3O7-DELTA THIN-FILMS BY LASER ABLATION DEPOSITION [J].

KOREN, G ;

GUPTA, A ;

BASEMAN, RJ .

APPLIED PHYSICS LETTERS, 1989, 54 (19) :1920-1922

[8] EPITAXIAL-GROWTH AND CRITICAL CURRENT-DENSITY OF THIN-FILMS OF YBA2CU3O7-X ON LAALO3 SUBSTRATES [J].

MOGROCAMPERO, A ;

TURNER, LG ;

HALL, EL ;

GARBAUSKAS, MF ;

LEWIS, N .

APPLIED PHYSICS LETTERS, 1989, 54 (26) :2719-2721

[9] PROPAGATION OF TERAHERTZ BANDWIDTH ELECTRICAL PULSES ON YBA2CU3O7-DELTA TRANSMISSION-LINES ON LANTHANUM ALUMINATE [J].

NUSS, MC ;

MANKIEWICH, PM ;

HOWARD, RE ;

STRAUGHN, BL ;

HARVEY, TE ;

BRANDLE, CD ;

BERKSTRESSER, GW ;

GOOSSEN, KW ;

SMITH, PR .

APPLIED PHYSICS LETTERS, 1989, 54 (22) :2265-2267

[10]

Simon R. W., 1989, Science and Technology of Thin Film Superconductors. Proceedings of the Conference, P337