ION-IMPLANTATION PROFILES IN BUBBLE GARNETS

被引:11
作者
GERARD, P [1 ]
DELAYE, MT [1 ]
DANIELOU, R [1 ]
机构
[1] CEA,DEPT RECH FONDAMENTALE,F-38041 GRENOBLE,FRANCE
关键词
D O I
10.1016/0040-6090(82)90352-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:75 / 79
页数:5
相关论文
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