A RAMAN-STUDY OF ETCHING SILICON IN AQUEOUS KOH

被引：86

作者：

PALIK, ED

GRAY, HF

KLEIN, PB

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 04期

关键词：

D O I：

10.1149/1.2119866

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：956 / 959

页数：4

共 39 条

[1] FABRICATION OF HIGH PRECISION NOZZLES BY ANISOTROPIC ETCHING OF (100) SILICON [J].

BASSOUS, E ;

BARAN, EF .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) :1321-1327

[2] ANISOTROPIC ETCHING OF SILICON [J].

BEAN, KE .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) :1185-1193

[3]

BERGMAN I., 1961, Journal of Applied Chemistry, V11, P369

[4] STRUCTURE IN IONIC SOLUTIONS .2. [J].

BRADY, GW .

JOURNAL OF CHEMICAL PHYSICS, 1958, 28 (03) :464-469

[5] STRUCTURE IN IONIC SOLUTIONS .1. [J].

BRADY, GW ;

KRAUSE, JT .

JOURNAL OF CHEMICAL PHYSICS, 1957, 27 (01) :304-308

[6] EFFECT OF DISSOLVED KBR, KOH OR HCL ON RAMAN SPECTRUM OF WATER [J].

BUSING, WR ;

HORNIG, DF .

JOURNAL OF PHYSICAL CHEMISTRY, 1961, 65 (02) :284-&

[7] FAR-INFRARED SPECTRUM OF LIQUID WATER [J].

DRAEGERT, DA ;

STONE, NWB ;

CURNUTTE, B ;

WILLIAMS, D .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1966, 56 (01) :64-&

[8] CONSTITUTION OF AQUEOUS OXYANIONS - PERRHENATE, TELLURATE AND SILICATE IONS [J].

EARLEY, JE ;

FORTNUM, D ;

WOJCICKI, A ;

EDWARDS, JO .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1959, 81 (06) :1295-1301

[9]

ENGELHARDT G, 1975, Z ANORG ALLG CHEM, V418, P17

[10] INTERPRETATION OF RAMAN DIFFUSION SPECTRA OF BINARY SILICA GLASSES [J].

ETCHEPARE, J .

SPECTROCHIMICA ACTA PART A-MOLECULAR SPECTROSCOPY, 1970, A 26 (11) :2147-+

← 1 2 3 4 →