EFFECTS OF OXYGEN-CONTENT ON THE OPTICAL-PROPERTIES OF TANTALUM OXIDE-FILMS DEPOSITED BY ION-BEAM SPUTTERING

被引：148

作者：

DEMIRYONT, H ^{[1
]}

SITES, JR ^{[1
]}

GEIB, K ^{[1
]}

机构：

[1] COLORADO STATE UNIV,DEPT PHYS,FT COLLINS,CO 80523

来源：

APPLIED OPTICS | 1985年 / 24卷 / 04期

关键词：

D O I：

10.1364/AO.24.000490

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：490 / 495

页数：6

共 17 条

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