THE REACTIVE SPUTTERING OF TANTALUM OXIDE - COMPOSITIONAL UNIFORMITY, PHASES, AND TRANSPORT MECHANISMS

被引：12

作者：

REITH, TM ^{[1
]}

FICALORA, PJ ^{[1
]}

机构：

[1] SYRACUSE UNIV, SYRACUSE, NY 13210 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1983年 / 1卷 / 03期

关键词：

D O I：

10.1116/1.572023

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：1362 / 1369

页数：8

相关论文

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