STRUCTURE AND ELECTRICAL PROPERTIES OF TA FILMS SPUTTERED IN AR-O2

被引：26

作者：

FEINSTEIN, LG

GERSTENBERG, D

机构：

来源：

THIN SOLID FILMS | 1972年 / 10卷 / 01期

关键词：

D O I：

10.1016/0040-6090(72)90273-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：79 / +

页数：1

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