Measurements of the temperature dependence of beta and V(BE) were made on AlGaAs/GaAs HBT's and used to determine device thermal resistance. The measurements were CW and not switched or pulsed in order to have a simpler procedure. With base doping greater than 10(19) cm-3 HBT's have negligible base-width modulation (i.e., flat I(C) versus V(CE) characteristics) which makes CW thermal resistance measurement especially direct and simple.