TEXTURE AND MORPHOLOGY OF SPUTTERED CR THIN-FILMS

被引：28

作者：

LEE, HJ

机构：

来源：

关键词：

D O I：

10.1063/1.334663

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4037 / 4039

页数：3

共 6 条

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[5] EVOLUTION OF MICROSTRUCTURE IN AMORPHOUS HYDROGENATED SILICON [J].

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