MEASUREMENT OF ROTATIONAL AND VIBRATIONAL TEMPERATURES IN A LOW-PRESSURE PLASMA-DEVICE USING THE ABEL TRANSFORM AND A SPECTRAL SLIT FUNCTION

被引:20
作者
CHELOUAH, A
MARODE, E
HARTMANN, G
机构
[1] Laboratoire de Physique des Dècharges, UPR114 du CNRS, Ecole Supèrieure d’Electricitè, Gif-sur-Yvette, 91192, Plateau du Moulon
关键词
D O I
10.1088/0022-3727/27/4/015
中图分类号
O59 [应用物理学];
学科分类号
摘要
Results of application of two-dimensional detection to optical emission spectroscopy diagnosis are given. The analysis was performed on a low-pressure (0.1 Torr) nitrogen plasma discharge produced by a new type of direct current reactor, which produces current amplification effects. The measured spectra are subjected to several treatments including calibration of the luminous intensity and Abel deconvolution, which allow us to construct radial spectra theoretically. A comparison between these spectra and simulated spectra has been carried out in order to evaluate the temperatures of the medium and to obtain their radial distribution. The possibility of obtaining a more accurate evaluation of rotational and vibrational temperatures is discussed.
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页码:770 / 780
页数:11
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