THIN-FILM INTERDIFFUSION .1. AU-PD, PD-AU, TI-PD, TI-AU, TI-PD-AU, AND TI-AU-PD

被引：87

作者：

POATE, JM

TURNER, PA

DEBONTE, WJ

YAHALOM, J

机构：

[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA

[2] TECHNION ISRAEL INST TECHNOL, HAIFA, ISRAEL

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 10期

关键词：

D O I：

10.1063/1.321411

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4275 / 4283

页数：9

共 22 条

[1]

BAGLIN JEE, 1974, APPLICATIONS ION BEA

[2] THEORETICAL ANALYSIS OF ENERGY-SPECTRA OF BACKSCATTERED IONS [J].

BRICE, DK .

THIN SOLID FILMS, 1973, 19 (01) :121-135

[3] RUTHERFORD SCATTERING STUDY OF DIFFUSION OF HEAVY-METAL IMPURITIES IN SILICON TO ION-DAMAGED SURFACE-LAYERS [J].

BUCK, TM ;

POATE, JM ;

PICKAR, KA ;

HSIEH, CM .

SURFACE SCIENCE, 1973, 35 (01) :362-379

[4]

CARSLAW HS, 1959, CONDUCTION HEAT SOLI, P185

[5]

CHU WK, 1974, ION BEAM SURFACE LAY, P423

[6] THIN-FILM INTERDIFFUSION .2. TI-RH, TI-PT, TI-RH-AU, AND TI-AU-RH [J].

DEBONTE, WJ ;

POATE, JM ;

MELLIARSMITH, CM ;

LEVESQUE, RA .

JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) :4284-4290

[7]

ENGLISH AT, 1972, J ELECTRON MATER, V1, P1

[8] RELATIVE MEASUREMENTS OF STOPPING CROSS-SECTION FACTORS BY BACKSCATTERING [J].

FENG, JSY ;

CHU, WK ;

NICOLET, MA ;

MAYER, JW .

THIN SOLID FILMS, 1973, 19 (02) :195-204

[9] CALCULATION OF DIFFUSION PENETRATION CURVES FOR SURFACE AND GRAIN BOUNDARY DIFFUSION [J].

FISHER, JC .

JOURNAL OF APPLIED PHYSICS, 1951, 22 (01) :74-77

[10]

GLEITER H, 1972, PROGR MATERIALS SCIE, V16, P94

← 1 2 3 →