MAGNETRON REACTIVE SPUTTERING OF COPPER INDIUM SELENIDE

被引:28
作者
THORNTON, JA [1 ]
LOMMASSON, TC [1 ]
机构
[1] UNIV ILLINOIS,DEPT MAT SCI,URBANA,IL 61801
来源
SOLAR CELLS | 1986年 / 16卷 / 1-4期
关键词
D O I
10.1016/0379-6787(86)90082-7
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
引用
收藏
页码:165 / 180
页数:16
相关论文
共 21 条
[1]  
BARON BN, 1985, COMMUNICATION JUN
[2]  
BETZ G, 1983, TOP APPL PHYS, V52, P11
[3]   RESEARCH ON POLYCRYSTALLINE THIN-FILM PHOTO-VOLTAIC DEVICES [J].
HERMANN, AM ;
FABICK, L .
JOURNAL OF CRYSTAL GROWTH, 1983, 61 (03) :658-664
[4]   GROWTH AND PROPERTIES OF SPUTTER-DEPOSITED CUINS2 THIN-FILMS [J].
HWANG, HL ;
CHENG, CL ;
LIU, LM ;
LIU, YC ;
SUN, CY .
THIN SOLID FILMS, 1980, 67 (01) :83-93
[5]   CHARACTERIZATION OF RF-SPUTTERED CUINSE2 FILMS [J].
KRISHNASWAMY, SV ;
MANOCHA, AS ;
SZEDON, JR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :510-511
[6]  
LAEGREID N, 1960, 6TH NAT S VAC TECHN, P164
[7]  
LAMOREAUX RH, 1983, SERI XZ202001 SRI IN
[8]   POLYCRYSTALLINE THIN-FILM CUINSE2/CDZNS SOLAR-CELLS [J].
MICKELSEN, RA ;
CHEN, WS ;
HSIAO, YR ;
LOWE, VE .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1984, 31 (05) :542-546
[9]   RF-SPUTTERED CUINSE2 THIN-FILMS [J].
PIEKOSZEWSKI, J ;
LOFERSKI, JJ ;
BEAULIEU, R ;
BEALL, J ;
ROESSLER, B ;
SHEWCHUN, J .
SOLAR ENERGY MATERIALS, 1980, 2 (03) :363-372
[10]  
ROTH J, 1983, TOP APPL PHYS, V52, P91