INFLUENCE ON DIAMOND NUCLEATION OF THE CARBON CONCENTRATION NEAR THE SUBSTRATE SURFACE

被引：21

作者：

MICHAU, D

TANGUY, B

DEMAZEAU, G

COUZI, M

CAVAGNAT, R

机构：

[1] UNIV BORDEAUX 1,CNRS,CHIM SOLIDE LAB,F-33405 TALENCE,FRANCE

[2] UNIV BORDEAUX 1,SPECT MOLEC & CRISTALLINE LAB,F-33405 TALENCE,FRANCE

来源：

关键词：

D O I：

10.1016/0925-9635(93)90137-Q

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A study of the influence on diamond nucleation of the carbon concentration in (or near the surface of) the substrate in a hot-filament chemical vapour deposition system is presented. The role of chemically bonded carbon (as carbide) and the role of additional ''free'' carbon on the surface of the substrate (before diamond deposition) are discussed versus the density of nucleation and the crystal quality of diamond deposited.

引用

页码：19 / 23

页数：5

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