HYDROGEN PASSIVATION AND REACTIVATION OF THERMAL DONORS IN SILICON

被引：12

作者：

BOHNE, DI

WEBER, J

机构：

[1] Max-Planck-Institut für Festkörperforschung, W-7000 Stuttgart 80

来源：

PHYSICAL REVIEW B | 1993年 / 47卷 / 07期

关键词：

D O I：

10.1103/PhysRevB.47.4037

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The dissociation of individual thermal-donor-hydrogen (TD-H) complexes is studied by means of infrared absorption, capacitance-voltage profiling, and deep-level transient spectroscopy. Contrary to earlier reports we determine the following dissociation energies: E(D)(TD1-H) = 1.90 +/- 0.07 eV, E(D)(TD2-H)= 1.67 +/- 0.05 eV, and for a mixture of different TD complexes E(D)(SIGMATD-H) = 1.61 +/- 0.05 eV. Our results ask for different core structures for TD1 and TDn with n greater-than-or-equal-to 2.

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页码：4037 / 4040

页数：4

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