A MATRIX APPROACH TO GRAZING-INCIDENCE X-RAY-DIFFRACTION IN MULTILAYERS

被引：21

作者：

STEPANOV, SA

PIETSCH, U

BAUMBACH, GT

机构：

[1] UNIV POTSDAM, D-14415 POTSDAM, GERMANY

[2] INST MAX VON LAUE PAUL LANGEVIN, F-38042 GRENOBLE, FRANCE

[3] MPG AG, RONTGENBEUGUNG, D-10117 BERLIN, GERMANY

来源：

ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER | 1995年 / 96卷 / 03期

关键词：

D O I：

10.1007/BF01313056

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

A method for computation of X-ray grazing-incidence diffraction (GID) in multilayers and superlattices is presented. The method is based on X-ray dynamical diffraction theory and a matrix from a boundary equations and provides a simple numerical solution of the problem. The application of the method to simulating GID measurements taken from AlAs/GaAs superlattice (20 periods of 14.6 nm AlAs and 6.8 nm GaAs) demonstrates the principal validity of the theory. A perfect matching between the theory and the experiment requires the real-structure effects of sample to be taken into account.

引用

页码：341 / 347

页数：7

共 19 条

[1] Aleksandrov P. A., 1985, Physics, Chemistry and Mechanics of Surfaces, V3, P2222
[2] A NEW METHOD FOR SURFACE-ANALYSIS OF CRYSTALS USING X-RAY-DIFFRACTION UNDER THE SPECULAR REFLECTION CONDITIONS
ALEKSANDROV, PA
AFANASEV, AM
GOLOVIN, AL
IMAMOV, RM
NOVIKOV, DV
STEPANOV, SA
[J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1985, 18 (FEB) : 27 - 32
[3] MATRIX ANALOG OF THE TAKAGI EQUATIONS FOR GRAZING-INCIDENCE DIFFRACTION
ANDREEVA, MA
ROCETE, K
KHAPACHEV, YP
[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1985, 88 (02): : 455 - 462
[4] DIFFRACTION AND X-RAY REFLECTION AT GRAZING-INCIDENCE - POSSIBILITIES OF STUDYING MULTILAYER THIN-FILM STRUCTURES
GOLOVIN, AL
IMAMOV, RM
MELIKYAN, OG
[J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1989, 22 : 406 - 409
[5] GOLOVIN AL, 1989, SOV PHYS APPL PHYS, V9, P95
[6] JENICHEN B, 1994, 2ND EUR S XRAY TOP H
[7] MELIKYAN OG, 1991, KRISTALLOGRAFIYA+, V36, P549
[8] MELIKYAN OG, 1992, SOLID STATE PHYS, V4, P1572
[9] MICROSCOPIC STRUCTURE OF INTERFACES IN SI1-XGE/SI HETEROSTRUCTURES AND SUPERLATTICES STUDIED BY X-RAY-SCATTERING AND FLUORESCENCE YIELD
MING, ZH
KROL, A
SOO, YL
KAO, YH
PARK, JS
WANG, KL
[J]. PHYSICAL REVIEW B, 1993, 47 (24) : 16373 - 16381
[10] DEPTH-RESOLVED MEASUREMENT OF LATTICE-RELAXATION IN GA1-XINXAS/GAAS STRAINED-LAYER SUPERLATTICES BY MEANS OF GRAZING-INCIDENCE X-RAY-DIFFRACTION
PIETSCH, U
METZGER, H
RUGEL, S
JENICHEN, B
ROBINSON, IK
[J]. JOURNAL OF APPLIED PHYSICS, 1993, 74 (04) : 2381 - 2387

← 1 2 →