EXTRACTION OF FREE-CARRIER DENSITY AND MOBILITY FROM THE OPTICAL-TRANSMISSION DATA OF TIN-DOPED INDIUM OXIDE THIN-FILMS

被引：9

作者：

RAUF, IA ^{[1
]}

机构：

[1] UNIV CAMBRIDGE,MP GRP,CAVENDISH LAB,CAMBRIDGE CB3 0HE,ENGLAND

来源：

MATERIALS LETTERS | 1995年 / 23卷 / 1-3期

关键词：

D O I：

10.1016/0167-577X(95)00008-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A method for extracting the free electron density and mobility as well as the thickness of a semiconducting film from the optical transmission data is presented. The method is tested for tin-doped indium oxide thin films prepared with different thicknesses and different dopant concentrations. Thickness values extracted from this method agree very closely with those measured by interferometric method. Also, different samples prepared with the same dopant concentration exhibit similar carrier density but differ from those prepared with different dopant concentrations.

引用

页码：73 / 78

页数：6

共 10 条

[1]

ABELES F, 1971, PHYS THIN FILMS, V6, P151

[2]

Burstein E., 1954, PHYS REV, V93, P623

[3]

GERLACH E, 1977, FESTKORPERPROBLEME, V17, P157

[4] EVAPORATED SN-DOPED IN2O3 FILMS - BASIC OPTICAL-PROPERTIES AND APPLICATIONS TO ENERGY-EFFICIENT WINDOWS [J].

HAMBERG, I ;

GRANQVIST, CG .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (11) :R123-R159

[5]

HEAVENS OS, 1964, PHYS THIN FILMS, V2, P193

[6] THE INTERPRETATION OF THE PROPERTIES OF INDIUM ANTIMONIDE [J].

MOSS, TS .

PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1954, 67 (418) :775-782

[7] ELECTRICAL AND OPTICAL PROPERTIES OF SPUTTERED IN2O3 FILMS .I. ELECTRICAL PROPERTIES AND INTRINSIC ABSORPTION [J].

MULLER, HK .

PHYSICA STATUS SOLIDI, 1968, 27 (02) :723-&

[8] A NOVEL METHOD FOR PREPARING THIN-FILMS WITH SELECTIVE DOPING IN A SINGLE EVAPORATION STEP [J].

RAUF, IA .

JOURNAL OF MATERIALS SCIENCE LETTERS, 1993, 12 (24) :1902-1905

[9]

RAUF IA, 1990, 12TH P INT C EL MICR, P716

[10] DOPANT EFFECTS IN SPRAYED TIN OXIDE-FILMS [J].

SHANTHI, E ;

BANERJEE, A ;

CHOPRA, KL .

THIN SOLID FILMS, 1982, 88 (02) :93-100

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