A NOVEL METHOD FOR PREPARING THIN-FILMS WITH SELECTIVE DOPING IN A SINGLE EVAPORATION STEP

被引：32

作者：

RAUF, IA ^{[1
]}

机构：

[1] UNIV CAMBRIDGE,CAVENDISH LAB,MP GRP,CAMBRIDGE CB3 0HE,ENGLAND

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1993年 / 12卷 / 24期

关键词：

D O I：

10.1007/BF00882536

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1902 / 1905

页数：4

共 16 条

[1] SPRAY-DEPOSITED ITO-SILICON SIS HETEROJUNCTION SOLAR-CELLS [J].

ASHOK, S ;

SHARMA, PP ;

FONASH, SJ .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1980, 27 (04) :725-730

[2]

BUBE RH, 1977, P SOC PHOTOOPT INSTR, V114, P7

[3] TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].

CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

THIN SOLID FILMS, 1983, 102 (01) :1-46

[4]

COUTTS TJ, 1982, 16TH P IEEE PHOT SPE, P1288

[5] PREPARATION AND CHARACTERIZATION OF FLUORINATED INDIUM TIN OXIDE-FILMS PREPARED BY RF-SPUTTERING [J].

GEOFFROY, C ;

CAMPET, G ;

PORTIER, J ;

SALARDENNE, J ;

COUTURIER, G ;

BOURREL, M ;

CHABAGNO, JM ;

FERRY, D ;

QUET, C .

THIN SOLID FILMS, 1991, 202 (01) :77-82

[6] LIQUID-CRYSTAL DISPLAYS [J].

GOODMAN, LA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (05) :804-823

[7] EVAPORATED SN-DOPED IN2O3 FILMS - BASIC OPTICAL-PROPERTIES AND APPLICATIONS TO ENERGY-EFFICIENT WINDOWS [J].

HAMBERG, I ;

GRANQVIST, CG .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (11) :R123-R159

[8] ELECTRICAL AND OPTICAL PROPERTIES OF SPUTTERED IN2O3 FILMS .I. ELECTRICAL PROPERTIES AND INTRINSIC ABSORPTION [J].

MULLER, HK .

PHYSICA STATUS SOLIDI, 1968, 27 (02) :723-&

[9]

NASEEM S, 1986, THIN SOLID FILMS, V137, P65

[10] ELECTRICAL-PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY REACTIVE EVAPORATION [J].

NOGUCHI, S ;

SAKATA, H .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (08) :1523-+

← 1 2 →