PREPARATION AND CHARACTERIZATION OF FLUORINATED INDIUM TIN OXIDE-FILMS PREPARED BY RF-SPUTTERING

被引：10

作者：

GEOFFROY, C

CAMPET, G

PORTIER, J

SALARDENNE, J

COUTURIER, G

BOURREL, M

CHABAGNO, JM

FERRY, D

QUET, C

机构：

[1] LEMME,F-33405 TALENCE,FRANCE

[2] GRL,F-64170 ARTIX,FRANCE

来源：

THIN SOLID FILMS | 1991年 / 202卷 / 01期

关键词：

D O I：

10.1016/0040-6090(91)90543-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fluorinated indium tin oxide (FITO) films have been produced by r.f. magnetron sputtering of a target made of a mixture of indium sesquioxide and tin difluoride. The optical and electrical properties of the films have been investigated and correlated with the composition. The performances of FITO films have been compared with those of ITO films.

引用

页码：77 / 82

页数：6

共 7 条

[1]

BHARDWAJ A, 1981, SOL CELLS, P39

[2] PREPARATION AND CHARACTERIZATION OF INDIUM TIN OXIDE-FILMS PRODUCED BY THE DC SPUTTERING TECHNIQUE [J].