THE INFLUENCE OF DEPOSITION PARAMETERS ON THE OPTICAL AND ELECTRICAL-PROPERTIES OF RF-SPUTTER-DEPOSITED INDIUM TIN OXIDE-FILMS

被引：28

作者：

NASEEM, S ^{[1
]}

COUTTS, TJ ^{[1
]}

机构：

[1] SOLAR ENERGY RES INST,GOLDEN,CO 80401

来源：

THIN SOLID FILMS | 1986年 / 138卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90215-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：65 / 70

页数：6

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