ELECTRON-TRANSPORT, IONIZATION, ATTACHMENT, AND DISSOCIATION COEFFICIENTS IN SF6 AND ITS MIXTURES

被引：144

作者：

PHELPS, AV ^{[1
]}

VANBRUNT, RJ ^{[1
]}

机构：

[1] NBS,GAITHERSBURG,MD 20899

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 09期

关键词：

D O I：

10.1063/1.341300

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4269 / 4277

页数：9

共 116 条

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