CHARACTERIZATION OF AS-PREPARED AND ANNEALED HYDROGENATED CARBON-FILMS

被引：40

作者：

GONZALEZHERNANDEZ, J ^{[1
]}

CHAO, BS ^{[1
]}

PAWLIK, DA ^{[1
]}

机构：

[1] ENERGY CONVERS DEVICES INC, TROY, MI 48084 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575938

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2332 / 2338

页数：7

共 18 条

[1] MODELING STUDIES OF AMORPHOUS-CARBON
BEEMAN, D
SILVERMAN, J
LYNDS, R
ANDERSON, MR
[J]. PHYSICAL REVIEW B, 1984, 30 (02): : 870 - 875
[2] Colthup NB, 1975, INTRO INFRARED RAMAN
[3] USE OF RAMAN-SCATTERING TO INVESTIGATE DISORDER AND CRYSTALLITE FORMATION IN AS-DEPOSITED AND ANNEALED CARBON-FILMS
DILLON, RO
WOOLLAM, JA
KATKANANT, V
[J]. PHYSICAL REVIEW B, 1984, 29 (06): : 3482 - 3489
[4] STRUCTURE AND BONDING OF HYDROCARBON PLASMA GENERATED CARBON-FILMS - AN ELECTRON-ENERGY LOSS STUDY
FINK, J
MULLERHEINZERLING, T
PFLUGER, J
BUBENZER, A
KOIDL, P
CRECELIUS, G
[J]. SOLID STATE COMMUNICATIONS, 1983, 47 (09) : 687 - 691
[5] MODEL FOR RAMAN-SCATTERING FROM INCOMPLETELY GRAPHITIZED CARBONS
LESPADE, P
ALJISHI, R
DRESSELHAUS, MS
[J]. CARBON, 1982, 20 (05) : 427 - 431
[6] ELECTRON ENERGY LOSS STUDIES OF TRANSITION METAL DICHALCOGENIDES
LIANG, WY
CUNDY, SL
[J]. PHILOSOPHICAL MAGAZINE, 1969, 19 (161): : 1031 - &
[7] 1ST-ORDER AND 2ND-ORDER RAMAN-SCATTERING FROM FINITE-SIZE CRYSTALS OF GRAPHITE
NEMANICH, RJ
SOLIN, SA
[J]. PHYSICAL REVIEW B, 1979, 20 (02): : 392 - 401
[8] RAMAN-SCATTERING CHARACTERIZATION OF CARBON BONDING IN DIAMOND AND DIAMONDLIKE THIN-FILMS
NEMANICH, RJ
GLASS, JT
LUCOVSKY, G
SHRODER, RE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1988, 6 (03): : 1783 - 1787
[9] ELECTRON-SPECTROSCOPY STUDY OF HYDROGENATED AMORPHOUS-CARBON FILMS FORMED BY METHANE ION-BEAM DEPOSITION
OELHAFEN, P
FREEOUF, JL
HARPER, JME
CUOMO, JJ
[J]. THIN SOLID FILMS, 1984, 120 (03) : 231 - 238
[10] REYESMENA A, 1987, AMORPHOUS HYDROGENAT, V17, P229

← 1 2 →