ELECTRON-SPECTROSCOPY STUDY OF HYDROGENATED AMORPHOUS-CARBON FILMS FORMED BY METHANE ION-BEAM DEPOSITION

被引：31

作者：

OELHAFEN, P ^{[1
]}

FREEOUF, JL ^{[1
]}

HARPER, JME ^{[1
]}

CUOMO, JJ ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

THIN SOLID FILMS | 1984年 / 120卷 / 03期

关键词：

D O I：

10.1016/0040-6090(84)90299-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：231 / 238

页数：8

共 22 条

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[7] ELECTRICAL AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS
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[8] CHEMICAL MODIFICATION OF THE ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS
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[J]. SOLID STATE COMMUNICATIONS, 1980, 34 (07) : 531 - 534
[9] THERMOPOWER OF DOPED SEMICONDUCTING HYDROGENATED AMORPHOUS-CARBON FILMS
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[J]. SOLID STATE COMMUNICATIONS, 1982, 41 (01) : 23 - 27
[10] COLOR CHART FOR DIAMOND-LIKE CARBON-FILMS ON SILICON
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[J]. THIN SOLID FILMS, 1980, 70 (01) : L9 - L10

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