ELECTRICAL AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS

被引：130

作者：

MEYERSON, B

SMITH, FW

机构：

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1980年 / 35-6卷 / JAN-期

关键词：

D O I：

10.1016/0022-3093(80)90633-X

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：435 / 440

页数：6

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[10] DEPOSITION OF HARD SURFACE-LAYERS BY HYDROCARBON CRACKING IN A GLOW-DISCHARGE [J].

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