1ST STAGE IN THE DEVELOPMENT OF A SOFT-X-RAY REFLECTION IMAGING MICROSCOPE IN THE SCHWARZSCHILD CONFIGURATION USING A SOFT-X-RAY LASER AT 18.2 NM

被引：45

作者：

DICICCO, DS

KIM, D

ROSSER, R

SUCKEWER, S

机构：

[1] PRINCETON UNIV,DEPT MECH & AEROSP ENGN,PRINCETON,NJ 08544

[2] PRINCETON XRAY LASER INC,MONMOUTH JUNCTION,NJ 08852

来源：

OPTICS LETTERS | 1992年 / 17卷 / 02期

关键词：

D O I：

10.1364/OL.17.000157

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present results that demonstrate the proof of principle of a soft-x-ray reflection imaging microscope in the Schwarzschild configuration. A soft-x-ray laser operating at 18.2 nm was used as the x-ray source. Mo/Si multilayer mirrors with a normal-incidence reflectivity of approximately 20% per surface at 18.2-nm wavelength were used in the Schwarzschild objective.

引用

页码：157 / 159

页数：3

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