SOFT-X-RAY PROJECTION LITHOGRAPHY - PRINTING OF 0.2-MU-M FEATURES USING A 20-1 REDUCTION

被引：24

作者：

BERREMAN, DW

BJORKHOLM, JE

EICHNER, L

FREEMAN, RR

JEWELL, TE

MANSFIELD, WM

MACDOWELL, AA

OMALLEY, ML

RAAB, EL

SILFVAST, WT

SZETO, LH

TENNANT, DM

WASKIEWICZ, WK

WHITE, DL

WINDT, DL

WOOD, OR

BRUNING, JH

机构：

[1] AT&T BELL LABS,HOLMDEL,NJ 07733

[2] GCA CORP,TROPEL DIV,FAIRPORT,NY 14450

[3] UNIV MARYLAND,INST PHYS SCI & TECHNOL,COLLEGE PK,MD 20742

来源：

OPTICS LETTERS | 1990年 / 15卷 / 10期

关键词：

D O I：

10.1364/OL.15.000529

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate nearly diffraction-limited printing of 0.2-μm features, using soft x rays of approximately 36-nm wavelength. An open-stencil transmission mask with minimum features of 4 μm was imaged by a twentyfold-reduction Schwarzschild-type objective onto silicon wafers coated with various e-beam resists. Implications for soft-x-ray projection lithography are discussed. © 1990 Optical Society of America.

引用

页码：529 / 531

页数：3

共 13 条

[1] Aritome H., 1985, Microelectronic Engineering, V3, P459, DOI 10.1016/0167-9317(85)90057-7
[2] IMAGING OF LASER-PRODUCED PLASMAS AT 44-A USING A MULTILAYER MIRROR
BROWN, CM
FELDMAN, U
SEELY, JF
RICHARDSON, MC
CHEN, H
UNDERWOOD, JH
ZIGLER, A
[J]. OPTICS COMMUNICATIONS, 1988, 68 (03) : 190 - 195
[3] BRUIJN MP, 1988, P SOC PHOTO-OPT INS, V984, P54
[4] Ceglio N M, 1989, J Xray Sci Technol, V1, P7, DOI 10.3233/XST-1989-1103
[5] SOFT-X-RAY PROJECTION LITHOGRAPHY USING AN X-RAY REDUCTION CAMERA
HAWRYLUK, AM
SEPPALA, LG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2162 - 2166
[6] KINCAID BM, 1984, AIP C P, V118, P110
[7] SOFT-X-RAY REDUCTION LITHOGRAPHY USING MULTILAYER MIRRORS
KINOSHITA, H
KURIHARA, K
ISHII, Y
TORII, Y
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1648 - 1651
[8] Schmahl G., 1984, XRAY MICROSCOPY, P63
[9] Tenth micron lithography with a 10 Hz 37-2 nm sodium
Silvast, W.T.
Wood II, O.R.
[J]. Microelectronic Engineering, 1988, 8 (1-2) : 3 - 11
[10] COMPACT SCANNING SOFT-X-RAY MICROSCOPE USING A LASER-PRODUCED PLASMA SOURCE AND NORMAL-INCIDENCE MULTILAYER MIRRORS
TRAIL, JA
BYER, RL
[J]. OPTICS LETTERS, 1989, 14 (11) : 539 - 541

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