SOFT-X-RAY PROJECTION LITHOGRAPHY - PRINTING OF 0.2-MU-M FEATURES USING A 20-1 REDUCTION

被引:24
作者
BERREMAN, DW
BJORKHOLM, JE
EICHNER, L
FREEMAN, RR
JEWELL, TE
MANSFIELD, WM
MACDOWELL, AA
OMALLEY, ML
RAAB, EL
SILFVAST, WT
SZETO, LH
TENNANT, DM
WASKIEWICZ, WK
WHITE, DL
WINDT, DL
WOOD, OR
BRUNING, JH
机构
[1] AT&T BELL LABS,HOLMDEL,NJ 07733
[2] GCA CORP,TROPEL DIV,FAIRPORT,NY 14450
[3] UNIV MARYLAND,INST PHYS SCI & TECHNOL,COLLEGE PK,MD 20742
关键词
D O I
10.1364/OL.15.000529
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate nearly diffraction-limited printing of 0.2-μm features, using soft x rays of approximately 36-nm wavelength. An open-stencil transmission mask with minimum features of 4 μm was imaged by a twentyfold-reduction Schwarzschild-type objective onto silicon wafers coated with various e-beam resists. Implications for soft-x-ray projection lithography are discussed. © 1990 Optical Society of America.
引用
收藏
页码:529 / 531
页数:3
相关论文
共 13 条
  • [1] Aritome H., 1985, Microelectronic Engineering, V3, P459, DOI 10.1016/0167-9317(85)90057-7
  • [2] IMAGING OF LASER-PRODUCED PLASMAS AT 44-A USING A MULTILAYER MIRROR
    BROWN, CM
    FELDMAN, U
    SEELY, JF
    RICHARDSON, MC
    CHEN, H
    UNDERWOOD, JH
    ZIGLER, A
    [J]. OPTICS COMMUNICATIONS, 1988, 68 (03) : 190 - 195
  • [3] BRUIJN MP, 1988, P SOC PHOTO-OPT INS, V984, P54
  • [4] Ceglio N M, 1989, J Xray Sci Technol, V1, P7, DOI 10.3233/XST-1989-1103
  • [5] SOFT-X-RAY PROJECTION LITHOGRAPHY USING AN X-RAY REDUCTION CAMERA
    HAWRYLUK, AM
    SEPPALA, LG
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (06): : 2162 - 2166
  • [6] KINCAID BM, 1984, AIP C P, V118, P110
  • [7] SOFT-X-RAY REDUCTION LITHOGRAPHY USING MULTILAYER MIRRORS
    KINOSHITA, H
    KURIHARA, K
    ISHII, Y
    TORII, Y
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1648 - 1651
  • [8] Schmahl G., 1984, XRAY MICROSCOPY, P63
  • [9] Tenth micron lithography with a 10 Hz 37-2 nm sodium
    Silvast, W.T.
    Wood II, O.R.
    [J]. Microelectronic Engineering, 1988, 8 (1-2) : 3 - 11
  • [10] COMPACT SCANNING SOFT-X-RAY MICROSCOPE USING A LASER-PRODUCED PLASMA SOURCE AND NORMAL-INCIDENCE MULTILAYER MIRRORS
    TRAIL, JA
    BYER, RL
    [J]. OPTICS LETTERS, 1989, 14 (11) : 539 - 541