THE ELECTRON-DENSITY STABILIZATION PROCESS IN PULSED SURFACE-WAVE PLASMAS

被引:34
作者
GAMERO, A
COTRINO, J
SOLA, A
COLOMER, V
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D O I
10.1088/0022-3727/21/8/005
中图分类号
O59 [应用物理学];
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页码:1275 / 1281
页数:7
相关论文
共 18 条
[1]   IONIZATION BY A PULSED PLASMA SURFACE-WAVE [J].
BLOYET, E ;
LEPRINCE, P ;
BLASCO, ML ;
MAREC, J .
PHYSICS LETTERS A, 1981, 83 (08) :391-392
[2]   MICROWAVE DISCHARGES PRODUCED BY SURFACE-WAVES IN ARGON GAS [J].
BOISSELAPORTE, C ;
GRANIER, A ;
DERVISEVIC, E ;
LEPRINCE, P ;
MAREC, J .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1987, 20 (02) :197-203
[3]   MICROWAVE AND RF SURFACE-WAVE SUSTAINED DISCHARGES AS PLASMA SOURCES FOR PLASMA CHEMISTRY AND PLASMA PROCESSING [J].
CHAKER, M ;
MOISAN, M ;
ZAKRZEWSKI, Z .
PLASMA CHEMISTRY AND PLASMA PROCESSING, 1986, 6 (01) :79-96
[4]  
CHAKER M, 1982, J PHYSIQUE LETT, V43, P2920
[5]  
FERREIRA CM, 1983, J PHYS D APPL PHYS, V16, P1673, DOI 10.1088/0022-3727/16/9/013
[6]   THEORY OF A PLASMA-COLUMN SUSTAINED BY A SURFACE-WAVE [J].
FERREIRA, CM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (10) :1811-1830
[7]  
FERREIRA CM, 1986, 2 INT C SURF WAV PLA, P113
[8]  
GAMERO A, 1985, 17 INT C PHEN ION GA, V2, P676
[9]   AXIAL ELECTRON-DENSITY AND WAVE POWER DISTRIBUTIONS ALONG A PLASMA-COLUMN SUSTAINED BY THE PROPAGATION OF A SURFACE MICROWAVE [J].
GLAUDE, VMM ;
MOISAN, M ;
PANTEL, R ;
LEPRINCE, P ;
MAREC, J .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (11) :5693-5698
[10]   WAVE-PROPAGATION AND DIAGNOSTICS IN ARGON SURFACE-WAVE DISCHARGES UP TO 100-TORR [J].
GRANIER, A ;
BOISSELAPORTE, C ;
LEPRINCE, P ;
MAREC, J ;
NGHIEM, P .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1987, 20 (02) :204-209