EFFECTS OF MOLECULAR-WEIGHT AND PLASTICIZATION ON DISSOLUTION RATES OF THIN POLYMER-FILMS

被引：40

作者：

COOPER, WJ

KRASICKY, PD

RODRIGUEZ, F

机构：

[1] Cornell Univ, Sch of Chemical, Engineering, Ithaca, NY, USA, Cornell Univ, Sch of Chemical Engineering, Ithaca, NY, USA

来源：

关键词：

DISSOLUTION RATE - ELECTRONIC CHEMICALS - INTERFEROMETRY - PLASTICIZATION - RESIST FILMS;

D O I：

10.1016/0032-3861(85)90230-7

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

引用

页码：1069 / 1072

页数：4

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Thompson L.F., 1983, ACS S SERIES, V219

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UEBERREITER K, 1968, DIFFUSION POLYM

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