THEORETICAL CONSIDERATIONS ASSOCIATED WITH THE PRODUCTION OF NEGATIVE-IONS IN SPUTTER-TYPE ION SOURCES

被引:8
作者
ALTON, GD
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D O I
10.1109/TNS.1983.4332565
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1480 / 1490
页数:11
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