SIMPLE NEGATIVE-ION SPUTTER SOURCE

被引：29

作者：

CASKEY, GT

DOUGLAS, RA

RICHARDS, HT

SMITH, HV

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS | 1978年 / 157卷 / 01期

关键词：

D O I：

10.1016/0029-554X(78)90581-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：1 / 7

页数：7

相关论文

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