DETERMINATION OF THE FLEXURAL MODULUS OF THIN-FILMS FROM MEASUREMENT OF THE 1ST ARRIVAL OF THE SYMMETRICAL LAMB WAVE

被引：28

作者：

BOBBIN, SE

WAGNER, JW

CAMMARATA, RC

机构：

来源：

APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 13期

关键词：

D O I：

10.1063/1.106277

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A technique is presented to measure the flexural modulus of free-standing thin metallic films from 1 to 25-mu-m thick. Lamb waves are excited in the film with a pulsed Nd:YAG laser, and detected using heterodyne interferometry. Variability in wave-form structure is observed as a function of experimental parameters and film thickness. The first arrival of the symmetric Lamb mode can be unambiguously identified regardless of wave-form shape, and is used to calculate the flexural modulus.

引用

页码：1544 / 1546

页数：3

共 12 条

[1] [Anonymous], 1967, RAYLEIGH LAMB WAVES
[2] ELASTIC-CONSTANTS OF, AND STONELY WAVES IN, MOLYBDENUM FILMS MEASURED BY BRILLOUIN-SCATTERING
BELL, JA
ZANONI, R
SEATON, CT
STEGEMAN, GI
MAKOUS, J
FALCO, CM
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (08) : 610 - 612
[3] BOBBIN SE, 1991, THESIS J HOPKINS U
[4] RELATIONSHIP BETWEEN INTERFACIAL STRAIN AND THE ELASTIC RESPONSE OF MULTILAYER METAL-FILMS
CLEMENS, BM
EESLEY, GL
[J]. PHYSICAL REVIEW LETTERS, 1988, 61 (20) : 2356 - 2359
[5] SURFACE ACOUSTIC-WAVES IN NI-V SUPERLATTICES
DANNER, R
HUEBENER, RP
CHUN, CSL
GRIMSDITCH, M
SCHULLER, IK
[J]. PHYSICAL REVIEW B, 1986, 33 (06): : 3696 - 3701
[6] ESTIMATION OF THE THICKNESS OF THIN METAL SHEET USING LASER GENERATED ULTRASOUND
DEWHURST, RJ
EDWARDS, C
MCKIE, ADW
PALMER, SB
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (14) : 1066 - 1068
[7] ENHANCEMENT OF THE C-11 ELASTIC-CONSTANT OF AG/PD SUPERLATTICE FILMS AS DETERMINED FROM LONGITUDINAL GUIDED MODES
DUTCHER, JR
LEE, SM
KIM, J
STEGEMAN, GI
FALCO, CM
[J]. PHYSICAL REVIEW LETTERS, 1990, 65 (10) : 1231 - 1234
[8] FARTASH A, UNPUB
[9] A LASER STUDY OF TRANSIENT LAMB WAVES IN THIN MATERIALS
HUTCHINS, DA
LUNDGREN, K
PALMER, SB
[J]. JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 1989, 85 (04) : 1441 - 1448
[10] NEW MEASUREMENTS OF THE ELASTIC PROPERTIES OF COMPOSITION MODULATED CU-NI THIN-FILMS
MOREAU, A
KETTERSON, JB
MATTSON, J
[J]. APPLIED PHYSICS LETTERS, 1990, 56 (20) : 1959 - 1961

← 1 2 →