DETERMINATION OF BORON AND PHOSPHORUS IN BOROPHOSPHOSILICATE THIN-FILMS ON SILICON SUBSTRATES BY CAPILLARY ELECTROPHORESIS

The application of the new technique of electrophoretic capillary ion analysis (CIA) to the analysis of borophosphosilicate thin films (BPSG) is described. CIA and ion chromatography (IC) were shown to produce equivalent analytical results for boron, but the inductively coupled plasma spectroscopic procedure using optical detection (ICP-AES) yielded results which were 4.5 wt % higher. The +5 phosphorus contents for BPSG films measured by CIA, IC, and ICP-AES are in agreement. The use of vapor-phase decomposition (VPD) for this analysis is introduced.