AUTOMATED MICRO-RAMAN MAPPING AND IMAGING APPLIED TO SILICON DEVICES AND ZIRCONIA CERAMIC STRESS AND GRAIN-BOUNDARY MORPHOLOGY

被引：16

作者：

BOWDEN, M ^{[1
]}

DICKSON, GD ^{[1
]}

GARDINER, DJ ^{[1
]}

WOOD, DJ ^{[1
]}

机构：

[1] NEWCASTLE POLYTECH,DEPT CHEM & LIFE SCI,ELLISON PL,NEWCASTLE TYNE NE1 8ST,TYNE & WEAR,ENGLAND

来源：

APPLIED SPECTROSCOPY | 1990年 / 44卷 / 10期

关键词：

RAMAN SPECTROSCOPY; SURFACE ANALYSIS; SPECTROSCOPIC TECHNIQUES;

D O I：

10.1366/0003702904417544

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An automated, point-by-point, Raman mapping and imaging system is described that combines a 0.5-mu-m stepper-motor-driven stage, a Raman microscope, and a filter spectrograph with an intensified diode array detector. High-resolution Raman images of a silicon device structure and a map showing the presence of the monoclinic phase of zirconia (ZrO2) at grain boundaries and in stressed regions of a sinstered tetragonally stabilized ceramic are reported. The importance of image processing is demonstrated and emphasised.

引用

页码：1679 / 1684

页数：6

共 19 条

[1]

ARAHORI T, 1988, SUMITOMO SEARCH, V36, P97

[2]

ARAHORI T, 1988, ADV CERAM, V24, P549

[3]

BARBILLAT J, 1983, MICROBEAM ANAL, P281

[4]

BERGIN FJ, 1988, 11TH P INT C RAM SPE, P445

[5] LINE-SCANNED MICRO RAMAN-SPECTROSCOPY USING A COOLED CCD IMAGING DETECTOR [J].

BOWDEN, M ;

GARDINER, DJ ;

RICE, G ;

GERRARD, DL .

JOURNAL OF RAMAN SPECTROSCOPY, 1990, 21 (01) :37-41

[6]

BOWDEN MJ, IN PRESS

[7] MEASUREMENT OF THE CRYSTALLOGRAPHICALLY TRANSFORMED ZONE PRODUCED BY FRACTURE IN CERAMICS CONTAINING TETRAGONAL ZIRCONIA [J].

CLARKE, DR ;

ADAR, F .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1982, 65 (06) :284-288

[8] SPATIALLY RESOLVED RAMAN-SPECTROSCOPY STUDY OF TRANSFORMED ZONES IN MAGNESIA-PARTIALLY-STABILIZED ZIRCONIA [J].

DAUSKARDT, RH ;

VEIRS, DK ;

RITCHIE, RO .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1989, 72 (07) :1124-1130

[9] RAMAN MICROPROBE AND MICROSCOPE WITH LASER EXCITATION [J].

DELHAYE, M ;

DHAMELINCOURT, P .

JOURNAL OF RAMAN SPECTROSCOPY, 1975, 3 (01) :33-43

[10] LASER RAMAN MOLECULAR MICROPROBE (MOLE) [J].

DHAMELINCOURT, P ;

WALLART, F ;

LECLERCQ, M ;

NGUYEN, AT ;

LANDON, DO .

ANALYTICAL CHEMISTRY, 1979, 51 (03) :A414-&

← 1 2 →