A GENERAL AND SIMPLE APPROACH FOR THE DETERMINATION OF ENERGY ANALYZER TRANSMISSION FUNCTIONS

被引:10
作者
CARRAZZA, J
LEON, V
机构
[1] Intevep S.A. R&D Centre, Caracas, 1070A
关键词
D O I
10.1002/sia.740170502
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The transmission function of energy analyser LHS-11 from Leybold-Heraeus has been obtained from the dependence of the signal intensity on the instrument pass energy (E(p)) at a given kinetic energy of the incident electrons (E(k)). For the energy analyser, the transmission function has been expressed by the equation [GRAPHICS] A slight dependence of the exponent n on E(k) is observed, and it has been fitted by the equation [GRAPHICS] This is a very general characterization of the transmission that gives its analytical description in the whole XPS range for a given set of operational parameters, such as slit dimensions, sample size and sample position. From the transmission function obtained and using reported values of the photoionization cross-sections, two sets of XPS sensitivity factor for several elements have been calculated. With these factors, the surface concentrations of a multi-element sample have been determined with good agreement between the values after Mg and Al K-alpha excitation. These results suggest that corrections due to variations in the transmission function with E(k) can improve the accuracy of the calculated sensitivity factors.
引用
收藏
页码:225 / 229
页数:5
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