INTERDIFFUSION AT THE POLYIMIDE-CU INTERFACE

被引:99
作者
TROMP, RM
LEGOUES, F
HO, PS
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词
D O I
10.1116/1.573308
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:782 / 785
页数:4
相关论文
共 8 条
[1]  
CHOU NJ, 1984, J VAC SCI TECHNOL A, V2, P751, DOI 10.1116/1.572564
[2]  
Chu WK., 1978, BACKSCATTERING SPECT
[3]  
FELDMAN LC, 1982, MATERIALS ANAL ION C
[4]   CHEMICAL BONDING AT THE POLYIMIDE SURFACE [J].
HAHN, PO ;
RUBLOFF, GW ;
HO, PS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :756-760
[5]  
HAHN PO, 1985, J VAC SCI TECHNOL A, V3, P739
[6]  
HAHN PO, UNPUB
[7]   SURFACE GEOMETRIES FROM CHANNELING AND BLOCKING [J].
TROMP, RM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :1047-1054
[8]  
ZIEGLER JF, 1980, STOPPING RANGES IONS, V1