INTERDIFFUSION AT THE POLYIMIDE-CU INTERFACE

被引：99

作者：

TROMP, RM

LEGOUES, F

HO, PS

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期

关键词：

D O I：

10.1116/1.573308

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：782 / 785

页数：4

共 8 条

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[2]

Chu WK., 1978, BACKSCATTERING SPECT

[3]

FELDMAN LC, 1982, MATERIALS ANAL ION C

[4] CHEMICAL BONDING AT THE POLYIMIDE SURFACE [J].

HAHN, PO ;

RUBLOFF, GW ;

HO, PS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :756-760

[5]

HAHN PO, 1985, J VAC SCI TECHNOL A, V3, P739

[6]

HAHN PO, UNPUB

[7] SURFACE GEOMETRIES FROM CHANNELING AND BLOCKING [J].

TROMP, RM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :1047-1054

[8]

ZIEGLER JF, 1980, STOPPING RANGES IONS, V1