SUPERCRITICAL FLUID TRANSPORT CHEMICAL-DEPOSITION OF FILMS

被引：80

作者：

HANSEN, BN ^{[1
]}

HYBERTSON, BM ^{[1
]}

BARKLEY, RM ^{[1
]}

SIEVERS, RE ^{[1
]}

机构：

[1] UNIV COLORADO,COOPERAT INST RES ENVIRONM SCI,BOULDER,CO 80309

来源：

CHEMISTRY OF MATERIALS | 1992年 / 4卷 / 04期

关键词：

D O I：

10.1021/cm00022a003

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

[No abstract available]

引用

收藏

页码：749 / 752

页数：4

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