DEPOSITION OF PALLADIUM FILMS BY A NOVEL SUPERCRITICAL FLUID TRANSPORT-CHEMICAL DEPOSITION PROCESS

Palladium was pyrolytically deposited by a supercritical fluid transport-chemical deposition method using the metal beta-diketonate complex bis-(2,2,7-trimethyl-3,5-octanedionato)palladium(II). Deposition at a rate of 95 nm/min occurred at a substrate temperature of 740-degrees-C. X-ray diffraction and electron microprobe analyses of the reflective films that were deposited on fused silica substrates showed that they contained polycrystalline palladium. The films were electrically conductive, but conductivity was substantially lower than that for bulk palladium. X-ray diffraction of the films deposited on (100) Si substrates showed that palladium silicide was formed.