DEPOSITION OF PALLADIUM FILMS BY A NOVEL SUPERCRITICAL FLUID TRANSPORT-CHEMICAL DEPOSITION PROCESS

被引：27

作者：

HYBERTSON, BM ^{[1
]}

HANSEN, BN ^{[1
]}

BARKLEY, RM ^{[1
]}

SIEVERS, RE ^{[1
]}

机构：

[1] UNIV COLORADO,NOAA,COOPERAT INST RES ENVIRONM SCI,BOULDER,CO 80309

来源：

MATERIALS RESEARCH BULLETIN | 1991年 / 26卷 / 11期

关键词：

D O I：

10.1016/0025-5408(91)90118-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Palladium was pyrolytically deposited by a supercritical fluid transport-chemical deposition method using the metal beta-diketonate complex bis-(2,2,7-trimethyl-3,5-octanedionato)palladium(II). Deposition at a rate of 95 nm/min occurred at a substrate temperature of 740-degrees-C. X-ray diffraction and electron microprobe analyses of the reflective films that were deposited on fused silica substrates showed that they contained polycrystalline palladium. The films were electrically conductive, but conductivity was substantially lower than that for bulk palladium. X-ray diffraction of the films deposited on (100) Si substrates showed that palladium silicide was formed.

引用

页码：1127 / 1133

页数：7

共 30 条

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