XPS STUDY OF THE A-C-H/AL2O3 INTERFACE

被引：16

作者：

ERNST, KH ^{[1
]}

PATSCHEIDER, J ^{[1
]}

HAUERT, R ^{[1
]}

TOBLER, M ^{[1
]}

机构：

[1] BERNA AG,CH-4600 OLTEN,SWITZERLAND

来源：

SURFACE AND INTERFACE ANALYSIS | 1994年 / 21卷 / 01期

关键词：

D O I：

10.1002/sia.740210105

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The interface between diamond-like amorphous hydrogenated carbon (a-C:H) and Al2O3 was analysed by sputter depth profile analysis via x-ray photoelectron spectroscopy. X-ray photoelectron spectra were also recorded during direct ion beam deposition (CH4, E = 400 eV) monitoring the initial build-up of the interface. No stoichiometric interface compound was detected, although Al2O3 is reduced to Al2O3-x (x similar to 0.5-1) enabling an interaction with the carbon atoms. This results in an excellent adhesion of a-C:H to the chemically inert Al2O3.

引用

收藏

页码：32 / 37

页数：6

相关论文

共 31 条

[1]

BONETTI RS, 1990, METALLOBERFLACHE, V44, P209

[2] AUGER-ELECTRON SPECTROSCOPY STUDY OF THE INTERFACE BETWEEN BULK ALUMINUM AND BULK ALUMINUM-OXIDE [J].

CONTINI, V ;

PRESILLA, C ;

SACCHETTI, F ;

TOSTO, S .

SURFACE SCIENCE, 1992, 276 (1-3) :50-58

[3]

Franks J., 1990, MET MATER, V11, P695

[4] COMPOSITION AND SURFACE STRUCTURE OF (0001) FACE OF ALPHA-ALUMINA BY LOW-ENERGY ELECTRON DIFFRACTION [J].

FRENCH, TM ;

SOMORJAI, GA .

JOURNAL OF PHYSICAL CHEMISTRY, 1970, 74 (12) :2489-&

[5] INTERFACE MODIFICATIONS FOR IMPROVING THE ADHESION OF ALPHA-C-H FILMS TO METALS [J].

GRILL, A ;

MEYERSON, B ;

PATEL, V .

JOURNAL OF MATERIALS RESEARCH, 1988, 3 (02) :214-218

[6] CORRECTION OF PEAK SHIFT AND CLASSIFICATION OF CHANGE OF X-RAY PHOTOELECTRON-SPECTRA OF OXIDES AS A RESULT OF ION SPUTTERING [J].

HASHIMOTO, S ;

HIROKAWA, K ;

FUKUDA, Y ;

SUZUKI, K ;

SUZUKI, T ;

USUKI, N ;

GENNAI, N ;

YOSHIDA, S ;

KODA, M ;

SEZAKI, H ;

HORIE, H ;

TANAKA, A ;

OHTSUBO, T .

SURFACE AND INTERFACE ANALYSIS, 1992, 18 (12) :799-806

[7] XPS INVESTIGATION OF THE A-CH/AL INTERFACE [J].

HAUERT, R ;

PATSCHEIDER, J ;

TOBLER, M ;

ZEHRINGER, R .

SURFACE SCIENCE, 1993, 292 (1-2) :121-129

[8] ANALYSIS OF A-C-H SUPERHARD COATINGS BY SCANNING AUGER MICROSCOPE AND TARGET FACTOR-ANALYSIS [J].

HAUERT, R ;

PATSCHEIDER, J ;

ZEHRINGER, R ;

TOBLER, M .

THIN SOLID FILMS, 1991, 206 (1-2) :330-334

[9]

KAHN AA, 1983, IEEE ELECTRON DEVICE, V4, P146

[10] ESCA STUDIES OF METAL-OXYGEN SURFACES USING ARGON AND OXYGEN ION-BOMBARDMENT [J].

KIM, KS ;

BAITINGER, WE ;

AMY, JW ;

WINOGRAD, N .

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 5 (NOV-D) :351-367

← 1 2 3 4 →