INSITU COATING OF CARBON THIN-FILMS IN DC TOROIDAL DISCHARGES

被引:6
作者
SUGAI, H
KOJIMA, H
KAKO, H
URANO, S
OKUDA, T
机构
关键词
D O I
10.1016/0022-3115(87)90439-9
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:751 / 754
页数:4
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