PRESSURE-DEPENDENCE OF CARBON-FILM COATING BY A TOROIDAL METHANE DISCHARGE

被引：9

作者：

KOJIMA, H

KAKO, H

TERADA, M

SUGAI, H

OKUDA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期

关键词：

D O I：

10.1143/JJAP.24.1432

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1432 / 1435

页数：4

共 20 条

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