PRESSURE-DEPENDENCE OF CARBON-FILM COATING BY A TOROIDAL METHANE DISCHARGE

被引:9
作者
KOJIMA, H
KAKO, H
TERADA, M
SUGAI, H
OKUDA, T
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 11期
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D O I
10.1143/JJAP.24.1432
中图分类号
O59 [应用物理学];
学科分类号
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页码:1432 / 1435
页数:4
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