PHASE-SHIFTING IN AN OBLIQUE-INCIDENCE INTERFEROMETER

被引：11

作者：

BOEBEL, D

PACKROSS, B

TIZIANI, HJ

机构：

[1] UNIV STUTTGART,INST TECH OPT,W-7000 STUTTGART 80,GERMANY

[2] UNIV STUTTGART,INST APPL OPT,W-7000 STUTTGART 80,GERMANY

来源：

OPTICAL ENGINEERING | 1991年 / 30卷 / 12期

关键词：

OBLIQUE INCIDENCE INTERFEROMETERS; FRINGE ANALYSIS; PHASE-STEPPING TECHNIQUE; VARIABLE FRINGE DENSITY; OPTICALLY ROUGH SURFACES;

D O I：

10.1117/12.56025

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The evaluation of the interference pattern of a prism interferometer by a phase-stepping technique is described. The required phase shift is achieved by moving the surface under test perpendicular to the hypotenuse of the prism. Limits of this phase-shifting technique are discussed. A calibration method of the phase shift between the interferograms for the adjustable sensitivity of the interferometer is shown. Finally measurements of technical surfaces are presented.

引用

页码：1910 / 1914

页数：5

共 7 条

[1]

ABRAMSON N, 1969, OPTIK, V30, P56

[2]

BIRCH KG, 1972, OPTIK, V36, P399

[3] INTERFEROMETRIC FLATNESS TESTING OF NONOPTICAL SURFACES [J].