IMPLANTATION PROFILES OF LOW-ENERGY HELIUM IN NIOBIUM AND BLISTERING MECHANISM

被引:102
作者
BEHRISCH, R [1 ]
BOTTIGER, J [1 ]
ECKSTEIN, W [1 ]
LITTMARK, U [1 ]
ROTH, J [1 ]
SCHERZER, BMU [1 ]
机构
[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER
关键词
D O I
10.1063/1.88427
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:199 / 201
页数:3
相关论文
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