ANNEALING OF ION-IMPLANTED RESISTORS REDUCES THE 1/F NOISE

被引:72
作者
VANDAMME, LKJ [1 ]
OOSTERHOFF, S [1 ]
机构
[1] TWENTE UNIV TECHNOL,DEPT ELECT ENGN,ENSCHEDE,NETHERLANDS
关键词
D O I
10.1063/1.336897
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:3169 / 3174
页数:6
相关论文
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