REACTIVE SPUTTERING OF THIN CU2S FILMS FOR APPLICATION IN SOLAR-CELLS

被引：20

作者：

VANHOECKE, E

BURGELMAN, M

机构：

来源：

THIN SOLID FILMS | 1984年 / 112卷 / 02期

关键词：

D O I：

10.1016/0040-6090(84)90487-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：97 / 106

页数：10

共 23 条

[1]

ANAMALAI N, 1976, 12TH P IEEE PHOT SPE, P547

[2]

Armantrout G. A., 1978, Thirteenth IEEE Photovoltaic Specialists Conference1978, P383

[3] FORMATION OF THIN CU2S (CHALCOCITE) FILMS USING REACTIVE SPUTTERING TECHNIQUES [J].

ARMANTROUT, GA ;

MILLER, DE ;

VINDELOV, KE ;

BROWN, TG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :212-215

[4] EVAPORATION OF CUCL AND CUCL2 FOR THE FABRICATION OF CU2S/CDS THIN-FILM SOLAR-CELLS [J].

BURGELMAN, M ;

DEVOS, A .

THIN SOLID FILMS, 1983, 102 (04) :367-374

[5] X-RAY-DIFFRACTION STUDY OF THE DRY FORMATION OF CU2S-CDS SOLAR-CELLS [J].

DEVOS, A ;

STEVENS, K ;

VANDENDRIESSCHE, L ;

BURGELMAN, M .

SOLAR CELLS, 1983, 8 (01) :33-45

[6]

EISENMANN L, 1952, ANN PHYS-BERLIN, V10, P129

[7]

Elizalde E., 1982, Fourth E.C. Photovoltaic Solar Energy Conference. Proceedings of the International Conference, P809

[8] COPPER SULFIDE FILMS DEPOSITED BY CYLINDRICAL MAGNETRON REACTIVE SPUTTERING [J].

JONATH, AD ;

ANDERSON, WW ;

THORNTON, JA ;

CORNOG, DG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :200-203

[9]

Leong J., 1981, Fifteenth IEEE Photovoltaic Specialists Conference - 1981, P1016

[10] ELECTROCHEMICAL AND THERMODYNAMIC STUDIES ON SYSTEM COPPER-SULFUR AT TEMPERATURES T-15-90 DEGREES C [J].

MATHIEU, HJ ;

RICKERT, H .

ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-FRANKFURT, 1972, 79 (5-6) :315-&

← 1 2 3 →