AN NMR-STUDY OF THE STEP-BY-STEP PYROLYSIS OF A POLYSILAZANE PRECURSOR OF SILICON-NITRIDE

被引：24

作者：

BRODIE, N

MAJORAL, JP

DISSON, JP

机构：

[1] CNRS,CHIM COORDINAT LAB,205 ROUTE NARBONNE,F-31077 TOULOUSE,FRANCE

[2] ELF ATOCHEM,CTR RECH RHONE ALPES,F-69310 PIERRE BENITE,FRANCE

来源：

INORGANIC CHEMISTRY | 1993年 / 32卷 / 21期

关键词：

D O I：

10.1021/ic00073a030

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

引用

页码：4646 / 4649

页数：4

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